Process and apparatus for vapor transfer of very high purity liquids at high dilution
OwnerWarren D. Reynoldsinventor
Life of this patent
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Abstract
By the present invention, a high purity liquid is vapor transported by a carrier gas from a bubbler system at room temperature. The bubbler system uses a split flow path for developing a predetermined high dilution ratio without the need for refrigeration. The quartz inner chamber containing the liquid is contained within and protected by a sturdy outer chamber. Two valves control the bubbler system and allow the internals of the system to be purged of all moisture and impurities before operative use. The lengths and diameters of the flow path tubes are calibrated to enable development of a highly diluted, predetermined vapor-to-carrier-gas ratio for a given total flow rate of carrier gas.
Claims17
A bubbler system allowing for the bubbling of a carrier gas that is not exposed to the atmosphere through a liquid at ambient temperature having a chemical composition essentially uniform to develop a carrier gas stream having a predetermined dilute vapor-to-gas ratio comprising:
- a carrier gas source external to said bubbler system;
- a liquid having a chemical composition essentially uniform allowing for the liquid vapor enhancement of said carrier gas;
- a using system external to said bubbler system allowing for the use of said carrier gas once enhanced;
- a primary container composed of a closed inner chamber surrounded and enclosed by a closed outer chamber allowing for the containment of said liquid having chemical composition essentially uniform, the closed inner chamber having a bottom well;
- an inlet valve externally located to said primary container allowing for the importation of said carrier gas into said closed inner chamber of said bubbler system;
- an outlet valve externally located to said primary container allowing for the exportation of said carrier gas enhanced by the saturation vapor of said liquid having a chemical composition essentially uniform within said closed inner chamber of said bubbler system to said system;
- an inlet tube extending from the inferior portion of said inlet valve to the superior portion of said inner chamber and passing to said bottom well of said closed inner chamber allowing for flow of the carrier gas entering near the upper portion of said inlet tube and passing into said closed inner chamber;
- an inlet tube protective sleeve surrounding said inlet tube and extending from the inferior portion of said inlet valve to said closed outer chamber;
- an outlet tube extending from the inferior portion of said outlet valve to the superior portion of said closed inner chamber allowing for flow of said carrier gas exiting from the upper portion of said outlet tube and passing from said closed inner chamber;
- a by-pass tube of predetermined length and diameter connecting a peripheral port from said inlet valve to a peripheral port of said outlet valve allowing for the transportation of a stream of said carrier gas in order to equalize the flow of said carrier gas from said inlet tube to said outlet tube.
Dependencies are inferred from the claim text.