Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
AssigneeHauzer Holding B.V.
InventorsHans Veltrop, Harald Wesemeyer, Boudewijn J. A. M. Buil, Simon Boelens
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Abstract
A method and device are provided to prevent grooves from occurring on a cathode surface of a cathode arc discharge evaporating device by adding a second movement to a first rotational movement of a magnetic field generator within the device, which enables the arc spot to scan a substantial portion of the cathode surface.
Claims18
Method for mechanically moving a magnetic field generating device along a path near a cathode plate comprising:
- rotating said magnetic field generating device relative to said cathode plate according to a first rotational movement;
- simultaneously moving said magnetic field generating device according to a second movement;
- and
- wherein said path created by said first and second movements creates an erosion pattern over a substantial portion of said cathode plate.
Arrangement for mechanically moving a magnetic field generating device along a path near a cathode plate by means of first and second rotational movements, comprising a magnetic field generating device moveable with regard to a cathode plate of a cathode arc evaporizing device, arranged eccentrically with regard to the axis of a gear, being able to carry out said second rotation movement, said gear being engagable with a gear ring, being able to carry out the second rotation movement.
Dependencies are inferred from the claim text.