US 4,902,376 AGranted

Modified horizontal bridgman method for growing GaAs single crystal

AssigneeIndustrial Technology Research Institute

InventorsTzer-Perng Chen, Yih-Der Guo, Tsun-Tsai Chang

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Abstract

A process for growing a gallium arsenide single crystal from a polycrystalline gallium arsenide by the horizontal Bridgman technique includes (a) melting the polycrystalline gallium arsenide in a quartz boat which is placed in a quartz tube, at a temperature greater than 1238 deg C. but lower than the melting point of quartz, (b) decreasing the temperature of the melt of gallium arsenide from the seed/melt interface by moving a furnace to crystallize the melt, and (c) annealing the crystallized gallium arsenide during the crystal growth process at a temperature of 1100-1220 deg C.; wherein the above steps are carried out in the absence of an As vapor pressure controlling zone which is kept at a temperature of about 617 deg C. Due to the anealing step, the thermal stress is small and the dislocation hardly occurs. A short quartz tube can be employed due to the absence of the As zone.

Claims2

Dependent claims

A process for growing a gallium arsenide single crystal from a polycrystalline gallium arsenide by the horizontal Bridgman technique comprising:

(a) melting the polycrystalline gallium arsenide in a quartz boat which contains a seed and which is placed in a sealed quartz tube heated by a furnace, at a temperature greater than 1238 deg C. but lower than the melting point of quartz;
(b) cooling the melt from the seed end to start the crystal growing by moving the furnace;
and
(c) annealing the crystallized gallium arsenide during the crystal growth process at a temperature of 1100-l220 deg C.;
(d) cooling the annealled gallium arsenide to room temperature;
wherein said steps are carried out in the absence of a separate As vapor pressure controlling zone additionally comprising the step of introducing a small amount of arsenic into said quartz tube before sealing the quartz tube to maintain the stoichiometric composition. Said amount of arsenic being equal to that calculated by the ideal gas law as being lost by dissociation of GaAs at its melting point.

3 more elements

Dependencies are inferred from the claim text.