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US 4,901,670 AGranted
Elemental mercury source for metal-organic chemical vapor deposition
AssigneeSanta Barbara Research Center
InventorWilliam L. Ahlgren
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AssigneeSanta Barbara Research Center
InventorWilliam L. Ahlgren
Estimating the term…
Apparatus and method for supplying elemental mercury to a MOCVD reactor during the operation of the reactor and for maintaining a saturated mercury vapor atmosphere over a surface of a substrate. A susceptor assembly 10 includes a susceptor 20 having a surface for supporting a substrate 22 within a growth chamber. A reservoir 34 of liquid mercury 36 is disposed external to the reactor and supplies liquid mercury via a capillary feed tube 30 to a depression or trough 24 formed within a surface of the susceptor at an upstream position from the substrate. Mercury within the trough is vaporized by the heated susceptor and flows over the substrate, thereby establishing a saturated mercury atmoshere over the substrate. The reservoir may be pressurized by a source of gas or its vertical position may be adjusted to provide a gravity feed of the mercury.
A susceptor for use in a metal-organic chemical vapor deposition reactor comprising:
A susceptor assembly for use in a metal-organic chemical vapor deposition reactor comprising:
Apparatus for providing elemental liquid mercury to a chamber wherein the deposition of a mercury compound upon a substrate is accomplished, comprising:
A susceptor for use in a vertically disposed metal-organic chemical vapor deposition reactor comprising:
Dependencies are inferred from the claim text.