Crystal pulling apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsYouji Yamashita, Masakatu Kojima, Yoshiaki Matsushita, Masanobu Ogino
Life of this patent
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Abstract
The present invention discloses a crystal pulling apparatus having a double-crucible structure, wherein an inner crucible is located in an outer crucible. An end of a pipe-like passage is located in a through hole formed in a side wall of an inner crucible located in an outer crucible, and a melt is supplied from the outer crucible to the inner crucible through the pipe-like passage, during crystal pulling. During melting or neckdown, prior to crystal pulling, diffusion of an impurity between the melts in the outer crucible and the inner crucible, and exchange of the melts between the outer crucible and the inner crucible are prevented by the pipe-like passage.
Claims22
A crystal pulling apparatus comprising:
- an outer crucible for containing an undoped melt;
- an inner crucible, arranged concentrically and integrally with said outer crucible, containing a melt doped with an impurity, and having a diameter .sqroot.k times that of said outer crucible, when a segregation coefficient of the impurity if k;
- a through hole formed in said inner crucible;
- and
- melt supply means, one end of which is located in said through hole and an other end of which is located in the melt contained in said outer crucible, for supplying the melt contained in said outer crucible into said inner crucible during crystal pulling, for preventing diffusion of the doping impurity between the melt in said outer crucible and that in said inner crucible, and for preventing exchange of the melt between said outer crucible and said inner crucible before the forming of a crown, said melt supply means being a passage having a length equal to or greater than a diffusion constant .sqroot.2DT, where D is the diffusion coefficient of the doping impurity in the melt and T is the time interval from the dissolving of the doping impurity into the melt until the end of neckdown.
A crystal pulling apparatus comprising:
- an outer crucible for containing a melt;
- an inner crucible, arranged concentrically and integrally with said outer crucible, for containing a melt;
- a through hole formed in said inner crucible;
- melt supply means, an end of which is located in said through hole and an other end of which is located in the melt contained in said outer crucible, for supplying the melt contained in said outer crucible into said inner crucible, during crystal pulling, for preventing diffusion of the doping impurity between the melt in said outer crucible and that in said inner crucible, and for preventing exchange of the belt between said outer crucible and said inner crucible before the forming of a crown, said melt supply means being a passage having a length equal to or greater than a diffusion constant .sqroot.2DT, wherein D is the diffusion coefficient of the doping impurity in the melt and T is the time interval from the dissolving of the doping impurity into the melt until the end of neckdown;
- and
- a ballast pin for moving vertically in an outer chamber formed by said outer crucible and said inner crucible to maintain a liquid surface of the melt in said inner crucible at a constant level.
A crystal pulling apparatus comprising:
- an outer crucible for containing a melt;
- an inner crucible located in said outer crucible and floating in the melt contained in said outer crucible;
- a through hole formed in said inner crucible;
- and
- melt supply means for supplying the melt from said outer crucible into said inner crucible during crystal pulling, one end of said melt supply means being located in said through hole, an other end of said melt supply means projecting above a surface of the melt contained in said outer crucible before the initial stage of crown, and being located below the surface of the melt contained in said outer crucible after the initial stage of crown.
A crystal pulling apparatus comprising:
- an outer crucible for containing a melt;
- an inner crucible located in said outer crucible and floating in the melt contained in said outer crucible;
- a through hole formed in said inner crucible;
- and
- melt supply means comprising a hollow pipe-like passage which prevents diffusion of a doping impurity between the melt in said outer crucible and that in said inner crucible, and exchange of the melt between said outer crucible and said inner crucible when crystal pulling is not performed, said pipe-like passage having a length equal to or greater than a diffusion distance .sqroot.2DT, where D is the diffusion coefficient of the doping impurity in the melt and T is the time interval from the dissolving of the doping impurity into the melt until the end of neckdown.
Dependencies are inferred from the claim text.