Thin-film heating element
AssigneeU.S. Philips Corporation
InventorsHans Auding, Gunter Frank, Heiner Kostlin, Bruno Vitt
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Abstract
A thin-film heating element is formed of a temperature-stable, electrically insulating substrate having a thin, electrically conductive metal oxide film which is doped with foreign atoms which compensate each other in pairs and which each consist of at least one acceptor-forming element and one donor-forming element the metal oxide film being provided with connecting electrodes; the metal oxide film being doped with maximally 10% of each of the foreign atoms compensating each other in pairs, the quantity of the atoms differing maximally 10%.
Claims10
A thin-film heating element comprising a temperature-stable, electrically insulating substrate having a thin, electrically conductive metal oxide film which is doped with foreign atoms which compensate each other in pairs and each of which pairs consist of at least one acceptor-forming element and one donor-forming element, the metal oxide film being provided with connecting electrodes, characterized in that the metal oxide film is doped with maximally 10 at % of each of the foreign atoms compensating each other in pairs, the quantity of said acceptor-forming elements and said donor-forming elements differs maximally by 10%.
Dependencies are inferred from the claim text.