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US 4,886,162 AGranted
Container for vacuum storing and/or shipping silicon wafers
AssigneeSGS-Thomson Microelectronics S.A.
InventorSala Ambrogio
Life of this patent
Estimating the term…
Abstract
A container specifically designed for vacumm holding and shipping a silicon wafer, is provided with two circular portions having circumferentially, on bulged top and lower faces outer rasied edges and, within the top face of the circular portion forming the bottom portion of the assembled container, an inner edge.
Claims5
A container designed for vacuum holding and transporting a silicon wafer, the container comprising:
- an upper circular portion having an outwardly bulged upper face, the upper circular portion having an outer raised edge near the periphery thereof,
- a lower circular portion having a circumference which is substantially the same as that of the other circular portion, the lower circular portion having an outwardly bulged lower face, the lower circular portion further comprising an outer raised edge near the periphery thereof and an inner raised edge of lesser height than the outer raised edge, and an opening comprising a break in the inner and outer raised edges of the lower circular portion,
- the upper and lower circular portions being adapted to form the closed container with the outer raised edge of the upper circular portion being substantially radially adjacent the inner raised edge of the lower circular portion, the edge of the wafer being located in use between said outer and inner raised edge of the upper and lower circular portion respectively.
Dependencies are inferred from the claim text.