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US 4,861,669 AGranted
Sputtered titanium oxynitride films
AssigneePPG Industries, Inc.
InventorFrank H. Gillery
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Abstract
A sputtered titanium oxynitride film is disclosed, as well as a low emissivity coated article comprising a titanium oxynitride film in combination with a highly infrared reflective metal film, such as silver.
Claims6
An article of manufacture comprising:
- a. a transparent, nonmetallic substrate;
- b. a first transparent metal film of highly infrared reflective metal;
- c. a second transparent metal film of a protective metal over the infrared reflective metal film;
- and
- d. a sputtered titanium oxynitride film.
2 more elements
An article of manufacture comprising:
- a. a glass substrate;
- b. a first layer of titanium oxynitride on the glass surface;
- c. a silver film deposited over said first titanium oxynitride layer;
- d. a film comprising titanium over the silver film;
- and
- a second layer of titanium oxynitride deposited over said film comprising titanium.
3 more elements
Dependencies are inferred from the claim text.