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US 4,838,289 AGranted
Apparatus and method for edge cleaning
AssigneeTexas Instruments Incorporated
InventorsRickie A. Kottman, Robert E. Terrill, Ann E. Wise
Life of this patent
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Abstract
Apparatus and method for cleaning material at the outer edge of an object by applying a solvent for the material to a flat surface adjacent the edge and moving the solvent onto the edge by centrifugal force.
Claims9
Apparatus for removing a deposit of material from an outer convex edge of an object having a substantially flat surface adjacent said edge, comprising:
- (a) a nozzle with an outlet end located in proximity to said surface near said edge;
- (b) a solvent at said outlet end of said nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto;
- and
- (c) a chuck for engaging and spinning said object to bring the transferred solvent into contact with said edge to thereby remove said material deposit.
1 more element
Dependencies are inferred from the claim text.