Substrate processing apparatus

A substrate processing apparatus including input and output chambers for loading and unloading substrates into and out of the apparatus and at least one substrate processing chamber connected to said input and output chambers for applying a plurality of processings to the substrates, said apparatus comprising:

• at least one separation chamber connected to the input and output chambers;
• a plurality of substrate processing chambers connected to said separation chamber for processing the substrates therein, said input and output chambers and said substrate processing chambers being arranged about said separation chamber;
• and
• gate valves respectively provided between said separation chamber and said input and output chambers and between said separation chamber and said respective substrate processing chambers for selective communication of the chambers between which the gate valves are arranged;
• said separation chamber being able to transfer the substrates therethrough, to temporarily maintain the substrates therein, and to distribute the substrates into the respective processing chambers;
• wherein the dimension of said separation chamber is enlargeable to accommodate a plurality of substrate processing chambers to be arranged thereabout;
• and
• wherein at least one partition is provided in said enlarged separation chamber to divide the same into a plurality of smaller separation chambers, the partition being provided with a gate valve for selectively providing passage between the smaller separation chambers.