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US 4,791,176 AGranted
Alkenylphenol and alkenylphenol ether copolymers
AssigneeSiemens Aktiengesellschaft
InventorsSiegfried Birkle, Recai Sezi, Hans-Dieter Feucht
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Abstract
The invention relates to new copolymers of alkenyl phenol or alkenyl phenol ether in combination with alkenyl silanes. These copolymers are useful positive photoresists.
Claims3
A copolymer of alkenyl silane and alkenyl phenol or alkenyl phenolether having the general formula ##STR3## wherein:
- m+n is 1;
- p and r each independently denote 0, 1, or 2;
- X is H, CH.sub.3, C.sub.2 H.sub.5 or halogen;
- Y is H, CH.sub.3 or halogen;
- R.sup.1 is H, halogen, alkyl or halogen alkyl;
- R.sup.2 is H, CH.sub.3, C.sub.2 H.sub.5, C.sub.3 H.sub.7 or C.sub.6 H.sub.5 ;
- R.sup.3 is H or R';
- R' is CH.sub.3, C.sub.2 H.sub.5, C.sub.3 H.sub.7, CH(CH.sub.3).sub.2, C(CH.sub.3).sub.3, C.sub.6 H.sub.11, C.sub.6 H.sub.5, CH.sub.2 C.sub.6 H.sub.5, CH.sub.2 OCH.sub.3, CH.sub.2 OCH.sub.2 CH.sub.2 OCH.sub.3, Si(CH.sub.3).sub.3, or Si(CH.sub.3).sub.2 C(CH.sub.3).sub.3 ;
- and said X, R.sup.1, R.sup.2 and Y being identical or different.
6 more elements
Dependencies are inferred from the claim text.