Cross-mask holder device
AssigneeIntel Corporation
InventorMark Leonov
Life of this patent
Estimating the term…
Abstract
A cross-mask and cross-mask holder with improved adjustment means. A cross-mask holder allows adjustment of a cross-mask in the x, y and theta directions. The cross-mask may be adjusted in the x and the y directions through use of screws on the side of the holder and may be adjusted in the theta direction by turning a tube which contains the cross-mask. The invention further discloses the use of an umbrella and cover assembly to reduce light source background noise which improves the alignment signal on an oscilloscope during processing of semiconductor wafers in a stepper machine.
Claims17
An apparatus for aligning a cross-mask, comprising:
- a holder;
- a cross-mask apparatus coupled with said holder;
- a first adjustment means coupled with said holder for adjusting said cross-mask in a first linear direction;
- a second adjustment means coupled with said holder for adjusting said cross-mask in a second linear direction generally perpendicular to said first linear direction;
- said cross-mask moving in said first linear direction when said first adjustment means is adjusted and said cross-mask moving in said second linear direction when said second adjustment means is adjusted;
- whereby, said cross-mask may be aligned through use of said first and said second adjustment means.
In a cross-mask and holder apparatus for aligning a cross-mask with a mark on a semiconductor wafer, said apparatus having a cross-mask apparatus and a holder apparatus, an improvement comprising;
- a first adjustment means coupled with said holder for adjusting said cross-mask in a first direction;
- a second adjustment means coupled with said holder for adjusting said cross-mask in a second direction generally perpendicular with said first direction;
- said cross-mask moving in said first direction when said first adjustment means as adjusted;
- said cross-mask moving in said second direction when said second adjustment means as adjusted;
- a tube for holding said cross-mask;
- said tube capable of moving said cross-mask in a third direction;
- wherein improved adjustment of said cross-mask is achieved.
In a cross-mask and holder apparatus for aligning a cross-mask with a mark on a semiconductor wafer during processing of the wafer in a stepper machine, an improvement comprising;
- a holder having a first and second adjustment means;
- a cross-mask apparatus comprising a tube having a cross-mask within it, said tube for protecting said cross-mask and for allowing adjustment of said cross-mask in a first direction;
- said first adjustment means comprising a screw and at least one spring for adjusting said cross-mask in a second direction;
- said second adjustment means having a screw for adjusting said cross-mask in a third direction generally perpendicular with said second direction;
- said apparatus further comprising a cover for protecting said apparatus and for reducing light background noise;
- said holder further comprising an umbrella for further reducing light background noise;
- whereby, improved adjustment of said cross-mask is achieved.
Dependencies are inferred from the claim text.