Process for producing silicon carbide whiskers
AssigneeJ. M. Huber Corporation
InventorsDale E. Schramm, Donald W. Birtell
Life of this patent
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Abstract
A method of manufacturing silicon carbide whiskers in which silicon and carbon containing feedstock is placed on a series of gas permeable supports and passed through a reaction zone. The feedstock is maintained at 1500.degree. C. to 1700.degree. C. between forty to eighty minutes while the off gases from other reacting feedstock is permitted to pass from one support to another. In this manner uniformity of environment is maintained to produce high quality silicon carbide whiskers having average diameters by mass between 1 and 1.5 microns.
Claims9
A method of manufacturing silicon carbide whiskers in a furnace including a sleeve-like core having a central axis for receiving a porous silic and carbon feedstock, the core extending from a preheat zone having a temperature less than 1300.degree. C., to a reaction zone having a temperature between substantially 1500.degree. C. and 1700.degree. C., and thence to a cooling zone having a temperature less than 1300.degree. C., the furnace further including a plurality of heating elements disposed in a heating chamber defined by an annulus between an outer reactor shell of the furnace and a portion of the core within the reaction zone, the method comprising:
- (a) providing a plurality of heat-resistant tray assemblies each including a planar tray plate and a spacer, said tray plate defining a lower surface of a reaction cavity and having a circular periphery formed about an axis, said spacer positioned on and extending axially from a surface of said tray plate and having a substantially uniformly sized through channel aligned with said plate axis, and each of the tray plates having at least one bore hole adjoining said spacer channel;
- (b) providing a first flow path for fluid communication between at least one of the reaction cavities and at least one of said spacer channels;
- (c) placing the feedstock on each of said tray plates;
- (d) stacking said plurality of tray assemblies serially within said core such that each of said tray plate axes is substantially aligned with said core central axis;
- (e) providing a second flow path axially aligned within said core and passing through said spacer channels and the boreholes in the tray plates;
- (f) providing a third flow path for maintaining fluid communication of oxide offgases between reaction cavities defined by tray plates of stacked tray assemblies;
- (g) moving said tray assemblies axially through the preheat, reaction and cooling zones for reacting said feedstock to produce silicon carbide whiskers and oxide offgases;
- (h) maintaining greater than atmospheric pressure within said heating chamber during step (g) to minimize flow of oxide offgases from the reaction cavities radially outward through said core;
- and
- (i) withdrawing oxide offgases through said axially aligned second flow path during steps (g) and (h) to uniformly relieve pressure within said core.
Dependencies are inferred from the claim text.