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US 4,787,508 AGranted
Integrated circuit wafer container
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin J. Wu, Genie Chen, Pai Y. Cheng, I Ping Hu, Tsu J. Lu, Jenn J. Wang
Life of this patent
Estimating the term…
Abstract
An integrated circuit (IC) wafer container for holding IC wafers is disclosed. The IC wafer container comprises an enclosure member and a body member. The body member has one or more longitudinal openings through which the IC wafers contained therein can be pinched out or sucked out safely by using a pincer or a vacuum sucker without damaging the IC wafers.
Claims3
An integreated circuit wafer container for containing integrated circuit wafers therein, comprising:
- an enclosure member and a body member, said enclosure member and said body member having respective longitudinally directed portions, said enclosure member being slidably insertable over said body member in said longitudinal direction in overlapping relation, said body member and said enclosure member being threadedly coupled each to the other by matingly engaging screw threads formed at a bottom portion of said enclosure member and said body member, respectively, a two-layer shield being formed to provide increased protection for said integrated circuit wafers therein, said body member having at least one longitudinal opening formed therethrough, thereby facilitating handling of said integrated circuit wafers.
Dependencies are inferred from the claim text.