Metal vapor generator
AssigneeHitachi, Ltd.
InventorsYukishige Kamino, Nobuyuki Hiraishi
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Abstract
A metal vapor generator of the present invention is constituted to locate an airtight joint between a body with an opening around its top and a bottom plate, in the vicinity of the lower portion of the body. According to such an arrangement, since said airtight joint locates at a side where a powder metal depositing material such as copper, aluminum or the like is filled up within the vessel and whose particle size of the depositing metal material is large, penetration of the particles into the airtight joint is reduced, thereby facilitating the detachment between the bottom plate and the body.
Claims7
A metal vapor generator including a vapor generating vessel having an opening, the vapor generating vessel being formed of a body and of a bottom plate, the bottom plate covering the bottom of the body, said opening being formed in the body, the vapor generating vessel being disposed within a vacuum chamber and being adapted to contain a depositing metal material, and heating means for heating the side wall of the vapor generating vessel so as to make metal vapor spout out through the opening of said vapor generating vessel by a difference in pressure between the vacuum chamber and the vapor generating vessel, characterized in that said opening is provided around the top of the body, the body being in the form of an inverted cup, and an airtight joint between the bottom plate and the body in the form of an inverted cup is located in the vicinity of a lower portion of the body in the form of an inverted cup, the bottom plate being detachable from the body in the form of an inverted cup, whereby the vapor generating vessel can be refilled and repeatedly employed.
Dependencies are inferred from the claim text.