Back to results
US 4,785,638 AGranted
Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films
AssigneeSGS-Thompson Microelectronics S.A.
InventorOrazio Viscuso
Life of this patent
Estimating the term…
Abstract
A refrigerant fluid trap for a vacuum evaporator for depositing a thin metal film including a U-shaped structure for passage of refrigerant fluid, forming an interior space for trapping condensable vapors. In said interior space there is housed a titanium evaporation source.
Claims3
A refrigerant fluid trap for a vacuum evaporator for depositing a thin film onto a substrate, comprising:
- a U-shaped structure including a base and two laterally-spaced limbs each having a free end and an end joined with a respective end of the base, whereby a trapping space is defined laterally intermediate said limbs of said U-shaped structure;
- means defining an internal duct in said U-shaped structure, including an inlet, an outlet, and respective portions extending on said base and said limbs whereby, as refrigerant fluid is circulated in said internal duct, said trapping space functions as a cold chamber;
- and
- an evaporation source for a metal to be deposited on a substrate, said evaporation source being disposed in said trapping space.
1 more element
Dependencies are inferred from the claim text.