Crucible for multi-bath liquid phase epitaxy
AssigneeU.S. Philips Corporation
InventorsFrancois Fromage, Marc Mahieu
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AssigneeU.S. Philips Corporation
InventorsFrancois Fromage, Marc Mahieu
Estimating the term…
The crucible is of the type in which substrates to be epitaxially coated are disposed in a slide comprising a substrate carrier (7), whose displacement permits of bringing the substrates (9) successively into contact with different baths of epitaxy. It comprises a compartment (2), in which tightening slides (11) and solution-containing slides (12) are alternately stacked, each of the latter slides having a cavity receiving a solution (14) and merging at the lower part of the said slide (12). The tightening slides (11) close the lower part of the cavities (45). The slide comprising a substrate carrier (7) can be translated between a rear position in which it is disengaged from the stack and a front position in which, after having driven out the lower slide of the stack, it is situated under this stack.
A crucible for carrying out a multi-bath liquid phase epitaxy process, in which substrates to be epitaxially coated are disposed in a slide comprising a substrate carrier, the displacement of which carrier allows bringing the substrates successively into contact with the different epitaxy baths, characterized in that said crucible comprises a compartment (2), in which sealing slides (11) and slides containing epitaxy baths (12) are alternately stacked, each of the latter slides (12) having a cavity (45) adapted to receive an epitaxy bath (14) and comprising a lower part merging with the lower surface (47) of said bath-containing slide (12), the sealing slides (11) being such that they seal the lower part of the said cavities (45), and in that the slide comprising a substrate carrier (7) can be translated in the same plane as the lowest slide of the stack of slides between a rear position in which it is disengaged from the stack and a front position in which, after having pushed out the lowest slide of the stack, it is situated under the stack.
Dependencies are inferred from the claim text.