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US 4,777,732 AGranted
Wafer centrifugal drying apparatus
AssigneeOki Electric Industry Co., Ltd.
InventorYoshifumi Hirano
Life of this patent
Estimating the term…
Abstract
A centrifugal wafer drying apparatus comprises a rotor rotatably disposed in a container, a cradle mounted on the rotor, and a carrier mounted in the cradle and having grooves for receiving wafers. The carrier holds the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.
Claims20
A centrifugal wafer drying apparatus comprising
- a container,
- a rotor rotatably disposed in the container, being rotatable about an axis of rotation,
- a cradle mounted on the rotor, and
- a carrier mounted in the cradle and having grooves for receiving wafers, the carrier holding the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.
1 more element
A wafer centrifugal drying apparatus comprising
- a rotor rotatable about a substantially vertical axis, and
- a carrier mounted on the rotor and having grooves for receiving wafers, the carrier holding the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.
A method of drying a semiconductor wafer by rotation to exert a centrifugal force on the wafer, said method comprising
- rotating the wafer about an axis of rotation, and
- holding the wafer in a manner such that the surface of the wafer is inclined with respect to a plane normal to the axis of the rotation.
A centrifugal wafer drying apparatus comprising
- a container;
- a rotor rotatably disposed in said container, said rotor being rotatable about an axis of rotation;
- a cradle mounted on said rotor;
- a carrier mounted in said cradle, said carrier having grooves for receiving said wafers;
- and
- a stop means for holding said cradle at a fixed position relative to said rotor to maintain said wafers at an oblique angle relative to a plane normal to said axis of rotation.
3 more elements
Dependencies are inferred from the claim text.