Method of manufacturing ceramic electronic device
AssigneeNEC Corporation
InventorsKazuaki Utsumi, Hideo Takamizawa, Mitsuo Tsuzuki, Michihisa Suga, Sadayuki Takahashi
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Abstract
A method of manufacturing a ceramic electronic device includes the steps of: forming a pattern of a predetermined shape made of a photosensitive resin; forming an electrical circuit element on a ceramic green sheet; stacking and pressing the pattern, the ceramic green sheet having the electrical circuit element thereon, and at least one ceramic green sheet to prepare a laminated body; and sintering the laminated body. A ceramic electronic device integrally including a cavity and the electrical circuit element therein is manufactured by this method.
Claims9
A method of manufacturing a ceramic electronic device comprising steps of:
- forming a material into a pattern of a predetermined shape, said material decomposing when it is heated to a temperature which is not higher than a sintering temperature of a ceramic material;
- forming an electrical circuit element in a ceramic green sheet of said ceramic material;
- stacking said pattern, said ceramic green sheet having said electrical circuit element, and at least another ceramic green sheet to obtain a laminated body;
- and
- sintering said laminated body to obtain a sintering body from which said material formed into said pattern has been removed by a decomposition thereof.
A method of manufacturing a ceramic electronic device, comprising steps of:
- forming a pattern of a predetermined shape made of a photosensitive resin;
- filling a ceramic paste in a portion excluding said pattern to form a ceramic green sheet incorporating said pattern;
- forming an electrical circuit element on another green sheet;
- stacking and pressing said ceramic green sheet incorporating said pattern, said another ceramic green sheet having said electrical circuit element, and at least still another ceramic sheet to form form a laminated body;
- removing a binder so as to decompose and remove an organic material contained in said laminated body;
- sintering said laminated body after removing of the binder is performed to obtain a sintered body in which is formed a cavity having a shape identical to said pattern;
- and cutting said sintering body including said cavity into pieces of a predetermined size.
A method of manufacturing an ink jet head comprising steps of:
- forming a material into a pattern having a shape which is identical to a shape of an ink passage of said ink jet head, said material decomposing when it is heated to a temperature which is not higher than a sintering temperature of a ceramic material;
- forming a plurality of ceramic green sheets made of said ceramic material, at least one of said plurality of ceramic green sheets being formed with an electrical circuit element therein;
- stacking said material formed into said pattern and said plurality of ceramic green sheets to obtain a laminated body;
- sintering said laminated body to obtain a sintered body from which said material formed into said pattern has been removed by a decomposition thereof;
- and
- cutting said sintered body to obtain said ink jet head.
Dependencies are inferred from the claim text.