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US 4,766,465 AGranted
Carry device for fine movement
AssigneeCanon Kabushiki Kaisha
InventorKazuo Takahashi
Life of this patent
Estimating the term…
Abstract
A carriage for fine movement includes a stationary stage, a movable stage slidably provided thereon, a moving mechanism, coupled to the stationary and movable stages, for moving the movable stage relative to the stationary stage, wherein at least one of the stationary stage, movable stage and moving mechanism is of a fine ceramic material to prevent distortion and variation with time to enhance the abrasion resistance.
Claims5
A stage for use in a semiconductor manufacturing apparatus that operates on a wafer, said stage comprising:
- a wafer carrier for carrying a wafer and mounted for movement;
- means for guiding the movement of said wafer carrier;
- and
- driving means for driving said wafer carrier along said guiding means, said driving means including driving force producing means and transmission means for transmitting the driving force produced thereby to said wafer carrier;
- said wafer carrier, said guiding means, and said transmission means being made of ceramic material.
2 more elements
Dependencies are inferred from the claim text.