Static pressure bearing
AssigneeCanon Kabushiki Kaisha
InventorsTakao Yokomatsu, Motomu Furukawa
Life of this patent
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Abstract
A static pressure bearing device for relatively supporting, in an ambience, an object for relative movement, comprising a fluid supplying portion for supplying a fluid to at least a portion of a surface of the object, and a suction pump for drawing the fluid supplied to the portion of the surface of the object by the fluid supplying portion, so as to substantially prevent leakage of the fluid into the ambience.
Claims7
A static pressure bearing device for relatively supporting an object for relative movement, comprising:
- a housing;
- a fluid supplying portion for supplying a fluid into said housing and to at least a portion of a surface of the object;
- suction means for drawing the fluid supplied to said portion of the surface of the object by said fluid supplying portion;
- and
- wall means for substantially sealing a space between said housing and the object;
- wherein said suction means includes a plurality of exhaust ports formed in said housing and a suction pump communicated with said exhaust ports, for drawing the fluid out of said housing, wherein said wall means includes a plurality of walls provided on said housing, and wherein said exhaust ports and said walls are disposed alternately.
A static pressure bearing device for relatively supporting an object for relative movement, said device comprising:
- a housing;
- a fluid supplying portion for allowing a fluid to be supplied into said housing and to at least a portion of a surface of the object;
- and
- sealing means for substantially sealing a space between said housing and the object, said sealing means including suction means having a plurality of exhaust ports formed in said housing, for drawing the fluid supplied to said portion of the surface of the object, said sealing means further including wall means having a plurality of walls provided on said housing and disposed in an alternate fashion with said exhaust ports, said walls cooperating with said exhaust ports to substantially seal the space between said housing and the object.
Dependencies are inferred from the claim text.