Photosensitive composition and pattern forming process using same
AssigneeHitachi, Ltd.
InventorsHajime Morishita, Saburo Nonogaki, Nobuaki Hayashi, Shoichi Uchino, Masahiro Nishizawa, Kiyoshi Miura, Osamu Sasaya, Yoshifumi Tomita
Life of this patent
Estimating the term…