Method for making a bipolar transistor and capacitors using doped polycrystalline silicon or metal silicide
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorShigeru Komatsu
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Abstract
The invention provides a method for making a semiconductor device including a bipolar transistor and a capacitor. An oxide film and a silicon nitride film are formed and patterned on a semiconductor substrate. A layer of polycrystalline silicon or of metal silicide containing an impurity is formed between an emitter electrode and an emitter region of the transistor and between an electrode and a thin oxide film of the capacitor. The doped polycrystalline silicon or metal silicide is then patterned to form a barrier layer protecting the oxide film and an intermediate layer acting as a diffusion source to the underlying substrate.
Claims2
A method for manufacturing a semiconductor device, comprising the steps of:
- forming a semiconductor substrate of a first conductivity type having a first impurity region and a second impurity region of a second conductivity type;
- forming an oxide film on said semiconductor substrate;
- forming on said oxide film a silicon nitride film having a first opening above said first impurity region and a second opening above said second impurity region;
- forming a contact hole in said oxide film through said second opening;
- forming a conductive layer containing an impurity of the first conductivity type, and made of a material selected from the group consisting of polycrystalline silicon and metal silicide, on said silicon nitride film and exposed regions of said oxide film and said substrate;
- selectivity removing said conductive layer to leave a first portion on said oxide film and a second portion on said substrate, said first portion acting as a barrier layer for protecting said oxide film, and said second portion acting as an intermediate layer;
- forming a third impurity region of the first conductivity type in said second impurity region by diffusing the impurity of said second portion into said second impurity region;
- and
- forming metal electrodes connected to said barrier layer and said intermediate layer.
Dependencies are inferred from the claim text.