Apparatus for monitoring epitaxial growth
AssigneeThe Perkin-Elmer Corporation
InventorL. Peter Erickson
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Abstract
The present invention is directed to apparatus for monitoring epitaxial crystalline growth mounted in a vacuum chamber, said apparatus including a support for mounting a single crystal substrate surface, a device for applying epitaxial material to the substrate surface, a device for impinging an electron beam upon the substrate surface to emit secondary electrons therefrom, and a system for detecting the secondary electrons emitted and for outputting a corresponding signal.
Claims10
Apparatus for monitoring epitaxial crystalline growth comprising, in combination:
- first means for mounting a single crystal substrate surface;
- second means for applying epitaxial material to said substrate surface;
- third means for impinging an electron beam upon said substrate surface to emit secondary electrons therefrom, said third means comprising a scanning electron gun disposed about normal to said substrate;
- and fourth means for detecting said secondary electrons emitted and for outputting a corresponding signal;
- said first means, second means, third means and fourth means being mounted in a vacuum chamber.
Apparatus for monitoring epitaxial crystalline growth comprising, in combination:
- first means for mounting a single crystal substrate surface;
- second means for applying epitaxial material in successive monolayers to said substrate surface;
- third means for impinging an electron beam upon said monolayers to emit secondary electrons therefrom;
- fourth means for detecting said secondary electrons emitted and for outputting a corresponding signal having periodic oscillations corresponding to the completion of each successive monolayer;
- and
- fifth means for displaying said periodic oscillations;
- wherein said third means comprises a scanning electron gun, disposed about normal to said substrate such that said fifth means displays an image of said monolayers, said image having oscillations in intensity corresponding to said periodic oscillations and thereby corresponding to the completion of said successive monolayer;
- said first means, second means, third means and fourth means being mounted in a vacuum chamber.
Dependencies are inferred from the claim text.