Articulated arm transfer device

An apparatus for transferring objects, comprising:

• a support;
• first and second articulated arms supported on said support;
• said first articulated arm having a drive segment disposed for rotation about a first axis and a driven segment joined to said drive segment by a pinned connection;
• said second articulated arm having a drive segment disposed for rotation about a second axis and a driven segment joined to said drive segment of said second articulated arm by a pinned connection, said drive segment of said second articulated arm being coupled to and driven by rotation of said drive segment of said first articulated arm;
• said drive segments being lesser in length than said driven segments;
• holding means pivotally coupled to said driven segments of said first and second articulated arms, said driven segments being engaged with each other by means of anti-rotation gears disposed at one end of each of said driven segments so as to prevent rotation of said holding means;
• said first and second articulated arm and said holding means being mounted for movement within a vacuum chamber, and said holding means including a platform coupled to said anti-rotation gears by bearings;
• means capable of driving said drive segment of said first articulated arm for rotation through an angle in the range of from greater than 90 degrees up to and including 180 degrees at a constant rotational speed to move said holding means between an extended position and a retracted position such that said holding means moves with harmonic motion;
• and
• axial displacement means for raising and lowering said support, said support being coupled to a base via a shaft with a rotation gear and a first motor;
• wherein said drive segments of said first and second articulated arms include circular gears disposed at one end of said drive segments, said circular gear coupled to said first articulated arm being responsive to said driving means which includes a second motor;
• and
• wherein said axial displacement means includes a plurality of flexures and as solenoid, wherein said solenoid is for applying a force to move said support vertically and said flexures are so arranged relative to said base and said solenoid as to flex when said support moves vertically.

An apparatus for transferring objects, comprising:

• a support;
• first and second articulated arms supported on said support;
• said first articulated arm having a drive segment disposed for rotation about a first axis and a driven segment joined to said drive segment by a pinned connection;
• said second articulated arm having a drive segment disposed for rotation about a second axis and a driven segment joined to said drive segment of said second articulated arm by a pinned connection, said drive segment of said second articulated arm being coupled to and driven by rotation of said drive segment of said first articulated arm;
• said drive segments being equal in length to said driven segments;
• holding means pivotally coupled to said driven segments of said first and second articulated arms, said driven segments being engaged with each other by means of anti-rotation gears disposed at one end of each of said driven segments so as to prevent rotation of said holding means;
• said first and second articulated arms and said holding means being mounted for movement within a vacuum chamber, and said holding means including a platform coupled to said anti-rotation gears by bearings;
• means capable of driving said drive segment of said first articulated arm for rotation through an angle in the range of from greater than 90 degrees up to and including 180 degrees at a constant rotational speed to move said holding means between an extended position and a retracted position such that said holding means moves with harmonic motion;
• and
• axial displacement means for raising and lowering said support, said supoprt being coupled to a base via a shaft with a rotation gear and a first motor;
• wherein said drive segments of said first and second articulated arms include circular gears disposed at one end of said drive segments, said circular gear coupled to said first articulated are being responsive to said driving means which includes a second motor;
• and
• wherein said axial displacement means includes a plurality of flexures and a solenoid, wherein said solenoid is for applying a force to move said support vertically and said flexures are so arranged relative to said base and said solenoid as to flex when said support moves vertically.