Method and apparatus for making electrophotographic devices

Apparatus for depositing a layer of material onto the outer surface of a plurality of substantially cylindrically-shaped members, said apparatus comprising:

• a substantially closed deposition chamber;
• a plurality of substantially cylindrically-shaped members;
• said members aligned in a substantially closed loop with the longitudinal axes thereof disposed substantially parallel to one another;
• the outer surfaces of adjacent members closely spaced apart to form a substantially closed inner chamber;
• means for introducing at least one reaction gas into the inner chamber, said at least one reaction gas including at least one element to be deposited;
• means for forming a plasma from said at least one reaction gas introduced into said inner chamber to deposit a uniform layer of material containing said at least one element onto at least a portion of the outer surfaces of each of said cylindrically-shaped members;
• and
• said plasma forming means including microwave generation means for initiating the radiation of microwaves externally of said deposition chamber and waveguide means positioned externally of said deposition chamber for directly transmitting said radiated microwaves into said inner chamber;
• said deposition of said uniform layer substantially limited to those portions of said outer surfaces of said members disposed within said inner chamber.