Back to results
US 4,724,356 AGranted
Infrared display device
AssigneeLockheed Missiles & Space Company, Inc.
InventorMax Daehler
Life of this patent
Estimating the term…
Abstract
A matrix of infrared generating cells is disclosed. Each cell includes a resistive element formed over and traversing a cavity formed on the surface of the supporting semiconductor substrate.
Claims3
A display device comprising:
- a semiconductor substrate having a first surface portion having an inverted pyramid cavity formed in said first surface;
- an infrared generating cell comprising a resistive element and a diode;
- said diode is formed on the first surface of said semiconductor substrate adjacent to said inverted pyramid cavity and is connected to said resistive element;
- and wherein said resistive element bridges said inverted pyramid cavity.
1 more element
A display device array comprising:
- a semiconductor substrate having a first surface portion including an array of inverted pyramid cavities formed in said first surface;
- a plurality of infrared generating cells, each infrared generating cell comprising a resistive element and a diode;
- each of said diodes formed on the first surface of said semiconductor substrate adjacent to an inverted pyramid cavity;
- each of said diodes connected to a resistive element;
- each of said resistive elements bridging one of said inverted pyramid cavities.
2 more elements
The method of fabricating a display device on a semiconductor, said method comprising the following steps:
- coating a silicon dioxide layer on a first surface of said semiconductor;
- etching at least one first window in said silicon dioxide layer to outline the desired dimensions and shape of the desired resistive element;
- doping the area defined by said window to form a resistive element;
- oxidizing said first surface of said semiconductor, including said window;
- opening at least one second window in said oxidized layer to outline a square superimposed on said resistive element;
- etching the area defined by said second window to form an inverted pyramid-shaped cavity;
- and,
- establishing electrical connections to said resistive elements.
5 more elements
Dependencies are inferred from the claim text.