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US 4,686,440 AGranted
Fine positioning device
AssigneesYotaro Hatamura, Hitachi Construction Machinery Co., Ltd.
InventorsYotaro Hatamura, Kozo Ono
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AssigneesYotaro Hatamura, Hitachi Construction Machinery Co., Ltd.
InventorsYotaro Hatamura, Kozo Ono
Estimating the term…
A fine positioning device is constructed of a parallel flexible-beam displacement mechanism and/or a radial flexible-beam displacement mechanism. The former displacement mechanism comprises a first rigid portion rigid against forces, a second rigid portion rigid against forces, plural parallel flexible beams connecting the first and second rigid portions together, and a first actuator adapted to have the plural flexible beams undergo bending deformation. The latter displacement mechanism comprises a third rigid portion rigid against torques, a fourth rigid portion rigid against torques, plural radial flexible beams connecting the third and fourth rigid portions together, and a second actuator adapted to have the plural flexible beams undergo bending deformation. The fine positioning device can obtain fine linear displacements and/or fine angular displacement with good accuracy. This invention also facilitates the construction of multi-axis positioning devices.
A fine positioning device characterized in that said device is equipped with at least one parallel flexible-beam displacement mechanism composed of a first rigid portion rigid against forces at least in one specific direction, a second rigid portion opposing to the first rigid portion and being rigid against forces at least in the same specific direction as above, plural flexible beams connecting the first rigid portion and the opposing second rigid portion to each other and arranged in parallel to each other or one another, and a first actuator mounted within the region surrounded by the first rigid portion, the second rigid portion and desired two of the plural flexible beams and adapted to have the plural flexible beam undergo bending deformation.
A fine positioning device characterized in that said device is equipped with at least one radial flexible-beam displacement mechanism composed of a third rigid portion rigid against torques at least around one specific axis, a fourth rigid portion opposing to the third rigid portion and being rigid against torques at least around the same axis as above, plural flexible beams connecting the third rigid portion and the opposing fourth rigid portion to each other and arranged radially relative to a specific axis, and a second actuator mounted within the region surrounded by the third rigid portion, the fourth rigid portion and desired two of the plural flexible beams and adapted to have the plural flexible beams undergo bending deformation.
A fine positioning device characterized in that said device is equipped with at least one parallel flexible-beam displacement mechanism composed of a first rigid portion rigid against forces at least in one specific direction, a second rigid portion opposing to the first rigid portion and being rigid against forces at least in the same specific direction as above, plural flexible beams connecting the first rigid portion and the opposing second rigid portion to each other and arranged in parallel to each other or one another, and a first actuator mounted within the region surrounded by the first rigid portion, the second rigid portion and desired two of the plural flexible beams and adapted to have the plural flexible beams undergo bending deformation;
Dependencies are inferred from the claim text.