Linear induction semiconductor wafer transportation apparatus
OwnerDavid Belnainventor
Life of this patent
Estimating the term…
Abstract
A semiconductor wafer transportation apparatus includes a car for supporting a semiconductor wafer, a track for guiding the car, and a linear induction motor for levitating and linearly propelling the car along the track. The motor includes a plurality of permanent magnets disposed on the car, a plurality of linearly disposed and selectively energizable electromagnets disposed along the track and circuitry to sequentially energize the electromagnets. Positioning magnets are used to eliminate friction between the car and the track, to control the degree of levitation and to insure precise lateral positioning of the car on the track, and light emitting diodes are used to detect the position of the car on the track.
Claims10
A linear induction transportation mechanism for semiconductor wafers, comprising:
- car means for supporting a semiconductor wafer, said car means including a body portion and a wafer support portion attached to said body portion and adapted to engage the body portion of an adjacent car means to allow said semiconductor wafer to be transferred to said adjacent car means;
- track means for guiding said car means;
- linear induction motor means for levitating and linearly propelling said car means along said track means;
- and
- control means for precisely controlling the amount of said levitating and for regulating the lateral movement of said car means relative to said track means.
A semiconductor wafer transport apparatus comprising:
- track means;
- car means, adapted to be electromagnetically supported from said track means, for supporting said semiconductor wafer, said car means including a plurality of permanent magnet means, a body portion surrounding said track means, with said permanent magnet means being disposed on said body portion, and a semiconductor wafer support portion attached to said body portion and adapted to engage the body portion of an adjacent car means whereby said semiconductor wafer may be transferred to said adjacent car means;
- a plurality of selectively energizable electromagnet means, linearly disposed adjacent said track means, for repelling said permanent magnet means when energized;
- and
- circuitry means, coupled to said electromagnet means, for sequentially energizing said electromagnet means, said sequential energizing both levitating and linearly propelling said car means along said track means.
Dependencies are inferred from the claim text.