Centrifugal wafer processor

An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising:

• rotatable frame means for releasably holding a carrier;
• a support structure;
• a container enclosing the rotatable frame means, the container having a first aperture for inserting and removing the carrier, and a second aperture, the container being mounted to the support structure;
• a drive motor mounted to the support structure;
• connecting means for connecting the rotatable frame to the drive motor through the second aperture in the container so the rotatable frame means is directly driven by the drive motor;
• gas seal means between the container and the connecting means, for maintaining a positive gas pressure to pressurize the inside of the container and to prevent contaminants from passing through the seal means;
• gas pressurization means for providing positive gas pressure to the gas seal means.

An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising:

• a rotatable frame for releasably holding a carrier, the frame configured to support the carrier during rotation such that the center line of rotation does not coincide with the center line of the wafers held in the carrier, the rotatable frame including a front and rear endpiece;
• a support structure;
• a drive motor mounted to the support structure, the motor having a drive shaft connected to the rear endpiece of the rotatable frame so as to directly drive the frame;
• a container enclosing the rotatable frame, the container including a sealable aperture through which the carrier can be removably inserted into the frame;
• a seal plate containing a second aperture through which the drive shaft connects to the rear end piece of the rotatable frame, the seal plate of the container being adjacent to, but separated by a space from, the rotatable frame and the connection between the rear endpiece of the rotatable frame and the motor;
• means forming a positive pressure gas seal in said space, the seal communicating with the second aperture in the seal plate to prevent contaminants from entering the seal, the gas seal further communicating with the inside of the container to provide a positive pressure to the inside of the container so as to prevent contaminants from entering the container;
• means forming a positive gas pressurization system connected to plural gas apertures in the back plate of the container, the gas apertures communicating with the gas seal so as to provide a positive pressure to the gas seal.