Process for positioning an interconnection line on an electric contact hole of an integrated circuit
AssigneeCommissariat a l'Energie Atomique
InventorsPierre Jeuch, Jean-Pierre Lazzari, Pierre Parrens
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Abstract
The invention relates to a process for the positioning of an interconnection line on an electric contact hole in an integrated circuit. According to the invention, one or more conductive layers forming a conductive covering are deposited on the complete integrated circuit. The first conductive layer is deposited by an isotropic process. The interconnection line to be produced is then masked by a resin layer, followed by the successive etching of each conductive layer. Finally, an overetching of these conductive layers is effected in the electric contact hole, followed by the elimination of the resin.
Claims11
A process for the positioning of an interconnection line on an electric contact hole of an integrated circuit, wherein, with the electric contact hole formed, such that the contact hole edges are substantially perpendicular to the surface of the integrated surface, the following operations are performed:
- deposition of at least one conductive layer on the complete integrated circuit, all of these conductive layers forming a conductive covering filling the contact hole and having a substantially planar surface following deposition and in which is produced the interconnection line, the first conductive layer being deposited isotropically;
- formation of a resin layer on the conductive covering, so as to mask the interconnection line to be produced;
- etching the resin-free part of the conductive covering;
- overetching, within the electric contact hole that part of the conductive covering which is free from resin and;
- elimination of the resin.
Dependencies are inferred from the claim text.