Vapor deposition regulating apparatus
AssigneeCanadian Patents and Development Limited
InventorJerzy A. Dobrowolski
Life of this patent
Estimating the term…
Loading patent…
AssigneeCanadian Patents and Development Limited
InventorJerzy A. Dobrowolski
Estimating the term…
A vapor deposition apparatus for continuously regulating the deposition thickness from vapor as it is being vacuum deposited across and progressively along one side of a substrate from one or more vapor sources spaced thereacross. The apparatus comprises a central shaft rotatably supporting hollow shafts in end-to-end relation, a series of profile discs on each of the hollow shafts and slidable radially thereon by a slot in each profile disc slidably locating on flats on the hollow shafts. The profile discs are placed between vapor sources, and the substrate moving through a vacuum coating chamber so that the profile discs form a mask controlling the vapor deposition across the substrate. The hollow shafts are coupled to electric motors which may rotate the hollow shafts in response to signals from deposition thickness sensing means.
A vapour deposition regulating apparatus for continuously regulating the deposition thickness from vapour as it is being vacuum deposited across and progressively along one side of a substrate, comprising:
Dependencies are inferred from the claim text.