Solution-dropping nozzle device
AssigneeTokyo Denshi Kagaku Co., Ltd.
InventorMuneo Nakayama
Life of this patent
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Abstract
A solution-dropping nozzle device comprising an inner tube of a relatively large diameter which permits a solution to flow down therethrough, and a plurality of outer tubes of a relatively small diameter adapted for supplying a cleaning solvent to the lower end part of the inner tube, the outer tubes having at least the lower end parts thereof tight-fitted on an outer circumferential portion of the inner tube so as to enclose the same continuously. The outer tubes may have the lower ends thereof positioned higher than the lower end of the inner tube. The nozzle device is free from the concentration of a dropping solution at the nozzle end part, and the eduction of a solute thereof.
Claims11
A solution-dropping nozzle device, comprising:
- an inner tube of a relatively large constant diameter which permits a solution to flow down therethrough;
- a plurality of outer tubes of a relatively small diameter adapted to supply a cleaning solvent to a lower end part of said inner tube;
- said outer tubes having at least lower end parts thereof tight-fitted on an outer circumferential portion of said inner tube so as to enclose the same substantially continuously;
- and
- said outer tubes having the lower ends thereof positioned higher than the lower end of said inner tube.
A solution-dropping nozzle device, comprising:
- an inner tube of a relatively large diameter which permits a solution to flow down therethrough;
- a plurality of outer tubes of a relatively small diameter adapted to supply a cleaning solvent to a lower end part of said inner tube;
- said outer tubes having at least lower end parts thereof tight-fitted on an outer circumferential portion of said inner tube so as to enclose the same substantially continuously;
- said outer tubes having the lower ends thereof positioned higher than the lower end of said inner tube;
- said lower ends of said outer tubes all being at substantially the same level;
- and
- said lower end parts of said outer tubes being cut obliquely and having the lowest edges thereof tight-fitted on said lower end part of said inner tube.
A solution-dropping nozzle device in a thin-film coating apparatus including a spinner, comprising:
- an inner tube of a relatively large constant diameter which permits a solution to flow down therethrough;
- a plurality of outer tubes of a relatively small diameter adapted to supply a cleaning solvent to a lower end part of said inner tube;
- said outer tubes having at least lower end parts thereof tight-fitted on an outer circumferential portion of said inner tube so as to enclose the same substantially continuously;
- and
- said outer tubes having the lower ends thereof positioned higher than the lower end of said inner tube.
Dependencies are inferred from the claim text.