Electron beam sensitive resist
AssigneeGAF Corporation
InventorDavid F. Lewis
Life of this patent
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Abstract
This invention describes an improved ionizing radiation sensitive material having high contrast, high sensitivity and comprised of a metal complex of a mixed half-ester or half amide product of the reaction of an N-hydroxy or N-aminoalkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkylvinyl ether-maleic anhydride copolymer. A typical material is made by reacting a metal salt with the mixed half-ester or half-amide product of the reaction of an N-hydroxy or N-amino alkyl amide and a hydroxy alkyl terminally unsaturated compound with an alkyl vinyl ether-maleic anhydride copolymer.
Claims6
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-hydroxyalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
A method of recording information on a coated substrate comprising the steps of laying down a substrate, coating the substrate with a copolymer of a metal complex wherein the metal is selected from a group consisting of lead, rhodium, calcium or thallium, wherein the lead, calcium or thallium complex is a salt formed by an excess metal ion and carboxy ion and the rhodium complex is a metal ion and an olefin group in a one to one relationship of the mixed half-ester reaction product of an alkyl vinyl ether maleic anhydride copolymer with a terminally unsaturated alcohol and an N-aminoalkyl amide, allowing the copolymer to dry on the substrate, and scanning the coated substrate with a beam of electrons.
Dependencies are inferred from the claim text.