Plasma vapor deposition film forming apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYasutomo Fujiyama, Shotaro Okabe
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Abstract
In a vapor deposition film forming apparatus having a plurality of reactors each having a substrate and an electrode oppositely arranged in a vacuum chamber and means for applying a voltage thereacross to react or decompose reaction gas introduced into the vacuum chamber, the reactors are arranged on the circumference of a circle and exhaust pipes having substantially equal exhaust resistance radially extend to the reactors from a common exhaust pipe located at the center of the circle.
Claims1
A vapor deposition film forming apparatus having a plurality of reactors each having a substrate and an electrode oppositely arranged in a vacuum chamber and means for applying a voltage thereacross to react or decompose reaction gas introduced into said vacuum chamber, wherein center axes of said reactors are arranged on the circumference of a circle and exhaust pipes having substantially equal exhaust resistance radially extend to said reactors from a common exhaust pipe located at the center of said circle.
Dependencies are inferred from the claim text.