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US 4,539,222 AGranted
Process for forming metal patterns wherein metal is deposited on a thermally depolymerizable polymer and selectively removed
AssigneeInternational Business Machines Corporation
InventorsHerbert R. Anderson, Jr., Constance J. Araps, Catherine A. Lotsko
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Abstract
A process for forming a desired metal pattern on a substrate which comprises forming a mask of a thermally depolymerizable polymer on the substrate with a pattern of openings complementary to the desired metal pattern, blanket coating the substrate and the mask with a metal, heating to depolymerize the thermally depolymerizable polymer, and removing the thermally depolymerizable polymer and metal thereover in a mild solvent.
Claims27
A process for forming a metal pattern on a substrate which comprises:
- forming a mask of at least one thermally depolymerizable polymer on the substrate with a pattern of openings complementary to the desired metal pattern;
- blanket coating the substrate and the mask with a metal;
- heating to thermally depolymerize the thermally depolymerizable polymer;
- and
- thereafter immersing the resulting assembly in a solvent to lift-off the depolymerized polymer and any metal thereover leaving metal in the desired pattern on the substrate.
2 more elements
Dependencies are inferred from the claim text.