Induction coil in the form of a pancake coil for crucible-free zone melting
AssigneeSiemens Aktiengesellschaft
InventorWolfgang Keller
Life of this patent
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Abstract
A pancake induction heating coil for crucible-free zone melting of semiconductor crystal rods, includes a primary winding surrounding a semiconductor rod to be remelted in the form of a ring through which cooling liquid flows, a secondary winding surrounding the primary winding and having a side facing the semiconductor rod, and an energy concentrator lying in the plane of the primary winding and having a circular opening formed substantially in the center thereof for the semiconductor rod, the side of the secondary winding facing the semiconductor rod being electrically conductingly connected to the energy concentrator.
Claims27
Pancake induction heating coil for cruciblefree zone melting of semiconductor crystal rod, comprising a primary winding surrounding a semiconductor rod to be remelted in the form of a ring through which cooling liquid flows, a hollow secondary winding surrounding said primary winding, and an energy concentrator lying in the plane of said primary winding and having a circular opening formed substantially in the center thereof for the semiconductor rod, said secondary winding and said energy concentrator each being subdivided into at least two segments being electrically separated from each other, each of said segments of said secondary winding being connected to a respective one of said segments of said energy concentrator.
Dependencies are inferred from the claim text.