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US 4,499,354 AGranted
Susceptor for radiant absorption heater system
AssigneeGeneral Instrument Corporation
InventorsLawrence B. Hill, Dennis Garbis, Robert C. Heller, Amedeo J. Granata
Life of this patent
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Abstract
A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.
Claims17
A susceptor for use in a chemical vapor deposition in a radiant absorption heating system comprising:
- (A) a heater for absorbing radiant energy and redirecting heat therefrom;
- and
- (B) a sheath of high purity quartz completely surrounding said heater for supporting on its outer surface substrates to receive vapor deposition.
Dependencies are inferred from the claim text.