Light illumination device

A device for projecting a pattern on a photomask onto a base plate through a projecting optical system, comprising:

• (a) means for providing a light source;
• (b) first optical means disposed to intersect across light energy emitted from said light source, said first optical means including a first multiplicity of lens elements for forming a multiplicity of images of said light source on a first focal plane and a second multiplicity of lens elements disposed in the vicinity of said first focal plane and corresponding respectively to said first multiplicity of lens elements for forming an image of said first multiplicity of lens elements on a second focal plane;
• (c) second optical means disposed to intersect across light energy emitted from said first optical means, said second optical means including a third multiplicity of lens elements disposed in the vicinity of said second focal plane for forming a multiplicity of images of said second multiplicity of lens elements on a third focal plane and a fourth multiplicity of lens elements disposed in the vicinity of said third focal plane and corresponding respectively to said third multiplicity of lens elements;
• and
• (d) third optical means disposed to intersect across light energy emitted from said second optical means, said third optical means forming an image of said fourth multiplicity of lens elements on a pupil of said projecting optical system.

A device for uniformly illuminating an object, comprising:

• (a) means for providing a light source;
• (b) collimator means for converting the light energy from said light source into collimated light energy;
• (c) first multiplicity of imaging lens elements and second multiplicity of imaging lens elements disposed in matrix form, respectively, adjacent to a first plane and a second plane which intersects perpendicular to said collimated light energy in order, said second multiplicity of imaging lens elements each corresponding to said first multiplicity of imaging lens elements;
• (d) third multiplicity of imaging lens elements and fourth multiplicity of imaging lens elements disposed in matrix form, respectively, adjacent to a third plane and a fourth plane which intersect perpendicular to the light energy passing through said first and second planes in order, said fourth multiplicity of imaging lens elements each corresponding to said third multiplicity of imaging lens elements;
• and
• (e) wherein said light source, said second plane, and said fourth plane and said object are in optically conjugate relation to one another and said first plane and said third plane are in optically conjugate relation to each other.