LPE Apparatus with improved thermal geometry
AssigneeAT&T Bell Laboratories
InventorsClaude L. Reynolds, Jr., Maria C. Tamargo
Life of this patent
Estimating the term…
Abstract
In LPE boat-slider apparatus the boat, which carries the melts, is made of lower thermal conductivity material than the slider, which carries the substrate. Illustratively, the boat comprises sapphire and the slider comprises graphite. A confined-melt geometry is also described in which another slider, used to skim off thin portions of the melt, is also made of the lower thermal conductivity material.
Claims6
Apparatus for the liquid phase epitaxial growth of semiconductor layers on a semiconductor substrate comprising
- a solution holder having a plurality of wells for carrying source solutions from which said layers are to be grown,
- a lower slider disposed under said holder and having a recess therein for carrying said substrate, characterized in that
- said holder comprises a material having a lower thermal conductivity than that of said slider.
Apparatus for the liquid phase epitaxial growth of Ga-containing Group III-V compound semiconductor layers on a Group III-V compound semiconductor substrate, comprising
- a sapphire solution holder having a plurality of wells for carrying Ga-containing source solutions from which said layers are to be grown,
- an upper sapphire slider disposed under said holder and having a plurality of apertures extending transversely therethrough for skimming off a portion of said solutions and for bringing said portions into contact with said substrate sequentially, and
- a graphite lower slider disposed under said upper slider and having a recess therein for carrying said substrate,
- said holder and said sliders being adapted so that when said solution portion is in contact with said substrate, it is surrounded on its top and sides by the sapphire of said holder and said upper slider.
Dependencies are inferred from the claim text.