Method for synthesizing diamond
AssigneeNational Institute for Researches in Inorganic Materials
InventorsMutsukazu Kamo, Seiichiro Matsumoto, Yoichiro Sato, Nobuo Setaka
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Abstract
A method for synthesizing diamond wherein hydrogen gas which has passed through a micro-wave non-electrode discharge and mixed with hydrocarbon gas, or a mixture gas consisting of hydrocarbon and hydrogen after its passing through a micro-wave non-electrode discharge, is introduced onto the surface of a substrate heated to a temperature of from 300.degree. to 1300.degree. C. to decompose hydrocarbon in its energetically activated state for the diamond deposition.
Claims5
A method for synthesizing diamond, characterized in that hydrogen gas which has passed through a micro-wave non-electrode discharge and mixed with hydrocarbon gas, or a mixture gas consisting of hydrocarbon and hydrogen after its passing through a micro-wave non-electrode discharge, is introduced onto the surface of a substrate heated to a temperature of from 300.degree. to 1300.degree. C. to decompose hydrocarbon in its energetically activated state for the diamond deposition.
A method for synthesizing diamond, characterized in that a micro-wave of 300 MHz and above is introduced into hydrogen gas or a mixture gas consisting of hydrogen gas and an inactive gas to generate a micro-wave plasma, then a substrate is placed in the micro-wave plasma thus generated to thereby heat the substrate to a temperature of from 300.degree. to 1300.degree. C. with the thus generated heat by the micro-wave plasma, and, at the same time, hydrocarbon is introduced onto the substrate, thereby depositing diamond on the surface of the substrate.
Dependencies are inferred from the claim text.