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AssigneesUlvac Seimaku Kabushiki Kaisha, Nihon Shinku Gijutsu Kabushiki Kaisha
InventorsKazuo Nakamura, Hirotsugu Mizorogi, Akihiko Isao
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An inhomogeneous optical layer is formed on a surface of a substrate in a vacuum coater, in which the substrate is moved along a travelling path having path sections and two substances are evaporated from their respective sources and both of the substances are deposited on a common surface section of the surface. In such an operation, the deposition rate of each of the substances is varied monotonously along the path in each of the path section in order that, in a layer formed by the deposition on the substrate, the content of each of the substances is varied monotonously in the direction of thickness. If the refractive index of one of the substances is different from that of the other of the substances, the resultant refractive index in the layer is varied monotonously in the direction of the thickness of the layer.
An apparatus for forming an inhomogenous optical layer on a surface of a substrate comprising a vacuum vessel, means for moving the substrate along a travelling path in the vacuum vessel, said travelling path having a path section or a number of path sections, two different source means for evaporating their respective different evaporation substances in the vacuum vessel, deposition rate regulating means for causing each of the evaporation substances evaporated from their respective source means to be deposited on the surface of the substrate moving along the travelling path with the depositing rate of each of the substances being varied monotonously along the travelling path in the path section or each of the path sections.
Dependencies are inferred from the claim text.