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US 4,400,256 AGranted
Method of making layered semiconductor laser
OwnerLeon H. Rileyinventor
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OwnerLeon H. Rileyinventor
Estimating the term…
A method for making a thin film layered semiconductor laser which includes depositing layers of semiconductor and electrical lead materials on an undoped semiconductor substrate and heating each layer of the semiconductor material after it has been deposited to improve crystallinity of the deposited semiconductor material and to improve interfaced continuity of the material at the lasing interface and at the electrical conductor to semiconductor interface, and after the desired number of layers of semiconductor and electrical lead materials have been deposited, cutting and polishing the ends of the laser device and finally placing a non-conductive dielectric reflecting surface on one of the polished end surfaces of the laser.
A method of making a layered semiconductor laser diode, comprising providing a semiconductor substrate, depositing a first layer of an electrical conductor on a portion of a surface of said semiconductor substrate by sputtering metal onto said semiconductor substrate, sputtering a layer of first semiconductor material over a portion of said first electrical conductor and a portion of said semiconductor substrate, heat treating said sputtered layer of first semiconductor material to improve crystallinity of said first semiconductor material, sputtering a layer of a second semiconductor material of a different type from said first semiconductor material over a portion of said first semiconductor material, heat treating said second semiconductor material to improve crystallinity of said second semiconductor material, and sputtering a second layer of an electrical conductor material over said second semiconductor material to form a laser junction with first and second electrical leads.
Dependencies are inferred from the claim text.