System and method for controlling an etch line
AssigneeRCA Corporation
InventorsHemmige V. Rangachar, Kenneth D. Powell
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Abstract
An etch line for etching apertures in a sheet of material is controlled by measuring the energy transmission capabilities of the apertures immediately after initially rinsing the sheet. A second energy transmission capability measurement is made after the sheet is fully dried. The results of the two measurements are combined to produce a predicted transmission signal which is used to control a parameter of the etching process.
Claims10
A method of etching a pattern of apertures in an etchable sheet of material comprising the steps of:
- passing said sheet through an etching process and measuring the actinic energy transmission capability of the etched apertures to obtain an early energy transmission signal;
- passing said sheet through at least one additional processing step including drying said material, and measuring the actinic energy transmission capability of the etched apertures to obtain a late energy transmission signal;
- utilizing said early and late transmission signals to obtain an error signal;
- and
- using said error signal to control a parameter of said etching process.
A system for controlling the etching of apertures in a sheet of material by varying an etching parameter in accordance with the energy transmission capabiliity of said apertures comprising:
- means for measuring the energy transmission capability of said apertures immediately after said etching and providing an early transmission signal;
- means for measuring the energy transmission capability of said apertures after said sheet of material passes through a drying cycle and providing a late transmission signal;
- means for receiving said early transmission signal and said late transmission signal and providing a predicted transmission signal;
- and
- means responsive to said predicted transmission signal for varying said etching parameter.
Dependencies are inferred from the claim text.