Process of producing color solid image pickup element base plates

Abstract

A multicolor solid image pickup element base plate having bonding pat portions is produced by an on-wafer method utilizing a silver halide photographic emulsion. A solvent permeation preventing layer is formed on a solid image pickup element base plate having an array of a number of image elements. A silver halide emulsion layer is formed on that layer. A micro color filter composed of two or more color separation filter elements is then formed on the emulsion layer. The filter is formed by repeatedly applying a pattern exposure and color development onto the emulsion layer. A protective layer is formed over the entire surface of the base plate. The protective layer, silver halide emulsion layer, and solvent permeation preventing layer are then successively removed. Blackened silver portions may be formed in the emulsion layer at portions corresponding to bonding pat portions prior to the formation of the protective layer by applying thereto a pattern exposure followed by black and white development.

Dependencies are inferred from the claim text.