Process for stabilizing in time a piezoelectric resonator
AssigneeCompagnie d'Electronique et de Piezo-Electricite
InventorGeorges Dube
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Abstract
The invention relates to piezoelectric resonators formed from a block of a crystalline material. During finishing of such resonators, some of the faces thereof, the distances between which define the frequency, are subjected to abrasive operations which alter the surface state of the network, with surface cracks, dislocations and fragmentations. The invention provides a process for implanting light ions on these faces (He, Li, Be) after finishing, by creating therein a layer of vitreous protection silica from the crystallized quartz.
Claims8
A process for forming a piezoelectric resonator which has time stabilized oscillation characteristics comprising the steps of:
- forming a block of material in the crystalline state;
- performing mechanical finishing operations on said block of crystalline material;
- subjecting at least one face of said block of crystalline material to ion implantation wherein said ions are one of helium, lithium and beryllium in order to transform said crystalline material on said at least one face of said block to the vitreous state to a predetermined depth of less than 1 micron.
Dependencies are inferred from the claim text.