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US 4,397,722 AGranted
Polymers from aromatic silanes and process for their preparation
AssigneeInternational Business Machines Corporation
InventorIvan Haller
Life of this patent
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Abstract
Thermally stable electrically insulating polymers are obtained from aromatic silanes by low power, radio frequency glow discharge polymerization at elevated temperature and low vapor pressure.
Claims10
A polymer formed by low power, radio frequency glow discharge polymerization of a completely aromatic silane monomer at elevated temperature and low vapor pressure.
A process for forming a polymer, said process comprising the low power, radio frequency glow discharge polymerization at elevated temperature and low vapor pressure of a completely aromatic silane monomer.
Dependencies are inferred from the claim text.