Method of making CCD imagers
AssigneeRCA Corporation
InventorAlvin M. Goodman
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Abstract
The preferred embodiment of the invention disclosed herein provides a CCD imager with reduced striation contrast in its displayed image. The wafer on which the imager is to be formed is lightly doped with atoms of one conductivity type. Before forming the various regions of the imager in the wafer, a layer is first doped with atoms of the same conductivity type so as to have a substantially uniform lateral concentration. This is preferably accomplished by ion implantation and diffusion techniques. Thereafter, an imager is formed in this layer in accordance with any desired technique.
Claims7
A method of making a CCD imager having a photosensing register on a semiconductor wafer initially doped with atoms of one conductivity type, the method comprising:
- doping a layer of material adjacent one major surface of said wafer which includes at least the entire portion of the surface containing the photosensing register with a substantially uniform lateral concentration of atoms of said one conductivity type;
- doping regions of said layer with conductivity type determining atoms to provide channels along which charge can be transferred;
- providing a channel oxide layer over said major surface;
- and
- providing a plurality of generally parallel electrodes extending generally transverse to said channels over said channel oxide layer.
Dependencies are inferred from the claim text.