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AssigneeHitachi, Ltd.
InventorsAkira Sasano, Toshio Nakano, Ken Tsutsui, Michiaki Hashimoto, Tadao Kaneko, Yoshio Taniguchi, Haruo Matsumaru, Akiya Izumi
Estimating the term…
According to a solid-state imager of this invention, in case where a plurality of color filters are disposed on a semiconductor body for the solid-state imager including a plurality of photosensitive regions and where the color filter of a third color is constructed by the overlapping between filter members of a first color and a second color, that one of the filter members which has a spectral transmittance substantially transmitting light for exposure for use in forming the filter members is arranged as a lower layer closer to a substrate of the semiconductor body. Even when the filter members are formed by the exposure process, a solid-state imager having good characteristics can be manufactured.
A solid-state color imager having at least a semiconductor body which includes a plurality of sets of photosensitive regions therein, and color filter members which are arranged on the semiconductor body in correspondence with the photosensitive regions, said color filter members being formed by exposing desired areas of photosensitive films for color filter members to light and then developing said films into a layer in a desired shape for the colored filter members, the color filter members having at least two sorts of spectral transmittances different from each other, a third spectral transmittance to correspond to one of the photosensitive regions in each set being produced by combining the spectral transmittances of the first and second filter members;
A method of manufacturing a solid-state color imager comprising the steps of forming a photosensitive film for a color filter member on a semiconductor body, said semiconductor body including a plurality of sets of photosensitive regions, exposing a desired area of the photosensitive film to light and then developing it into a layer in a desired shape for the color filter member, endowing the layer for the color filter member with a predetermined spectral transmittance to finish the color filter member, and covering the color filter member with a light-transmitting intermediate layer, the operations being repeated to successively form color filter members which have predetermined spectral transmittances respectively, a protective layer being disposed as an uppermost layer, the color filter members having at least two sorts of spectral transmittances different from each other, the color filter member exhibiting the first spectral transmittance being overlaid with the color filter member exhibiting the second spectral transmittance, a third spectral transmittance being produced by combining the first and second spectral transmittances;
Dependencies are inferred from the claim text.