Method of manufacturing an optically readable information carrier using deep U.V. radiation

A method of manufacturing an optically readable information carrier in which a substrate plate is provided on one side or on both sides with an optical structure which structure comprises an information track of information areas situated alternatively at a higher and a lower level, characterized in that a substrate plate which is manufactured entirely from polymethylmethacrylate is exposed, according to a lithographic process, to deep ultraviolet light through a mask which is brought into contact with a surface of said substrate plate, said mask comprising a supporting plate which is transparent to deep ultraviolet light, said supporting plate being provided on the side facing the substrate with a layer of material impermeable to deep ultraviolet light, in which layer a pattern is provided corresponding to the optical structure to be provided in the substrate plate and the substrate plate thus exposed through said mask is then treated with a developer capable of disolving the exposed parts of said polymethylmethacrylate thereby dissolving the exposed parts of said polymethylmethylacrylate and forming an information track on said substrate plate.